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Microlithography fundamentals in semiconductor devices and fabrication technology / Saburo Nonogaki, Takumi Ueno, Toshio Ito.
LIBRA TK7871.85 .N66 1998
Available from offsite location
- Format:
- Book
- Author/Creator:
- Nonogaki, Saburo, 1930-
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction.
- Semiconductors.
- Microlithography--Industrial applications.
- Microlithography.
- Manufacturing processes.
- Photoresists.
- Physical Description:
- v, 327 pages : illustrations ; 24 cm
- Place of Publication:
- New York : Marcel Dekker, [1998]
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 0824799518
- OCLC:
- 38948131
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