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Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.
LIBRA TP156.V3 S78 1983
Available from offsite location
- Format:
- Book
- Author/Creator:
- Stuart, R. V.
- Language:
- English
- Subjects (All):
- Vacuum technology.
- Thin films.
- Cathode sputtering (Plating process).
- Physical Description:
- viii, 151 pages : illustrations ; 24 cm
- Place of Publication:
- New York : Academic Press, 1983.
- Notes:
- Includes index.
- ISBN:
- 0126747806
- OCLC:
- 8667288
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