Semiconductor technology : processing and novel fabrication techniques / edited by Mikhail Levinshtein, Michael S. Shur.

Format:

Book

Contributor:

Levinshteĭn, M. E. (Mikhail Efimovich)

Shur, Michael.

Language:

English

Subjects (All):

Semiconductors.

Semiconductor doping.

Semiconductors--Defects.

Physical Description:

xviii, 240 pages : illustrations ; 24 cm

Place of Publication:

New York : Wiley, [1997]

Summary:

The product of decades of Russian research in semiconductor technology, this invaluable book offers Western researchers and engineers a wide range of new techniques, recipes, and characterization methods that provide simpler, cheaper, and more effective solutions to problems in semiconductor processing and fabrication. Many of these approaches appear here for the first time in Western technological literature.

Notes:

"A Wiley-Interscience publication."

Includes bibliographical references and index.

ISBN:

0471127922

OCLC:

36327317