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Advanced metallization and interconnect systems for ULSI applications in ...
LIBRA TK7871.15.T85 W66a 1995-1997
Available from offsite location
- Format:
- Journal/Periodical
- Series:
- Materials Research Society conference proceedings
- Language:
- English
- Subjects (All):
- Integrated circuits--Ultra large scale integration--Design and construction--Congresses.
- Integrated circuits.
- Vapor-plating--Congresses.
- Vapor-plating.
- Electrochemical metallizing--Congresses.
- Electrochemical metallizing.
- Dielectrics--Congresses.
- Dielectrics.
- Titanium nitride--Congresses.
- Titanium nitride.
- Integrated circuits--Ultra large scale integration--Design and construction.
- Integrated circuits--Ultra large scale integration.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- volumes : illustrations ; 24 cm.
- Annual
- Began with 1995.
- Continues:
- Advanced metallization for ULSI applications in ...
- Place of Publication:
- Pittsburgh, Pa. : Materials Research Society
- Notes:
- Description based on: 1996.
- Contains papers presented at annual conference, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley.
- ISSN:
- 1048-0854
- OCLC:
- 37788210
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