1 option
The science and engineering of microelectronic fabrication / Stephen A. Campbell.
LIBRA TK7871.85 .C25 1996
Available from offsite location
- Format:
- Book
- Author/Creator:
- Campbell, Stephen A., 1954-
- Series:
- Oxford series in electrical engineering
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction.
- Semiconductors.
- Physical Description:
- xv, 536 pages : illustrations ; 25 cm.
- Place of Publication:
- New York : Oxford University Press, 1996.
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 0195105087
- OCLC:
- 32890988
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.