1 option
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A. / editors, B.R. Appleton, F.H. Eisen, T.W. Sigmon.
LIBRA TK7871.85 .I5855 1985
Available from offsite location
- Format:
- Book
- Conference/Event
- Conference Name:
- Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology (1985 : San Francisco, Calif.)
- Series:
- Materials Research Society symposia proceedings 0272-9172 ; v. 45.
- Materials Research Society symposia proceedings. 0272-9172 ; v. 45
- Language:
- English
- Subjects (All):
- Semiconductors--Congresses.
- Semiconductors.
- Ion implantation--Congresses.
- Ion implantation.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xv, 393 pages : illustrations ; 24 cm.
- Place of Publication:
- Pittsburgh, Pa. : Materials Research Society, [1985]
- Notes:
- "These proceedings are a referred account of the Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology presented at the 1985 spring meeting of the Materials Research Society, April 15-18, 1985, in San Francisco, California."--Pref.
- Includes bibliographies and indexes.
- ISBN:
- 0931837103 :
- OCLC:
- 12370982
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.