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Silicon-on-insulator : its technology and applications / edited by S. Furukawa.
LIBRA TK7871.85 .S548 1985
Available from offsite location
- Format:
- Book
- Conference/Event
- Conference Name:
- US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics" (1983 : Ōiso-machi, Japan)
- Language:
- English
- Subjects (All):
- Solid state electronics--Congresses.
- Solid state electronics.
- Integrated circuits--Design and construction--Congresses.
- Integrated circuits.
- Integrated circuits--Design and construction.
- Silicon--Congresses.
- Silicon.
- Epitaxy--Congresses.
- Epitaxy.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- viii, 295 pages : illustrations ; 24 cm
- Place of Publication:
- Tokyo : KTK Scientific Publishers ; Boston : D. Reidel ; Hingham, MA : Sold and distributed in the U.S.A. and Canada by Kluwer Academic Publishers, 1985.
- Notes:
- "Papers presented during the US-Japan Seminar on 'Solid Phase Epitaxy and Interface Kinetics' held in Oiso, Japan, June 20-24, 1983 ... co-sponsored by National Science Foundation and Japan Society for the Promotion of Science"--P. 5.
- Companion volume containing the other papers presented at seminar published under title: Layered structures and interface kinetics.
- "ASST, advances in solid state technology"--Cover.
- Includes bibliographies and index.
- ISBN:
- 9027719403
- OCLC:
- 11548649
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