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Semiconductor processing : a symposium / sponsored by ASTM Committee F-1 on Electronics ... [and others], San Jose, CA, 7-10 Feb., 1984 ; D.C. Gupta, editor.
LIBRA TK7871.85 .S467 1984
Available from offsite location
- Format:
- Book
- Conference/Event
- Conference Name:
- Symposium on Semiconductor Processing (3rd : 1984 : San Jose, Calif.)
- Series:
- ASTM special technical publication ; 850.
- ASTM special technical publication
- Language:
- English
- Subjects (All):
- Semiconductor industry--Congresses.
- Semiconductor industry.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 671 pages : illustrations ; 24 cm.
- Place of Publication:
- Philadelphia, PA : ASTM, [1984]
- Notes:
- "ASTM publication code number (PCN) 04-850000-46."
- Includes bibliographies and index.
- ISBN:
- 0803104030
- OCLC:
- 11090563
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