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Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles.
LIBRA TA2005 .P54 1985
Available from offsite location
- Format:
- Book
- Conference/Event
- Conference Name:
- Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.)
- Series:
- Materials Research Society symposia proceedings ; v. 38.
- Materials Research Society symposia proceedings ; v. 38
- Language:
- English
- Subjects (All):
- Plasma engineering--Congresses.
- Plasma engineering.
- Plasma etching--Congresses.
- Plasma etching.
- Electronics--Materials--Congresses.
- Electronics.
- Electronics--Materials.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xv, 522 pages : illustrations ; 24 cm.
- Place of Publication:
- Pittsburgh, Pa. : Materials Research Society, [1985]
- Notes:
- Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.
- Includes bibliographies and indexes.
- ISBN:
- 0931837030 :
- OCLC:
- 11784552
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