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Applications of plasma processes to VLSI technology / edited by Takuo Sugano ; translated by Hyo-gun Kim.
LIBRA TK7871.85 .H34713 1985
Available from offsite location
- Format:
- Book
- Standardized Title:
- Handōtai purazuma purosesu gijutsu. English
- Language:
- English
- Japanese
- Subjects (All):
- Semiconductors--Etching.
- Semiconductors.
- Integrated circuits--Very large scale integration--Design and construction.
- Integrated circuits.
- Plasma etching.
- Vapor-plating.
- Physical Description:
- xiv, 394 pages : illustrations ; 24 cm
- Place of Publication:
- New York : John Wiley & Sons, 1985.
- Notes:
- "Wiley-Interscience publication."
- Includes index.
- ISBN:
- 0471869600
- OCLC:
- 11754602
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