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Plasma etching in semiconductor fabrication / Russ A. Morgan.
LIBRA TK7871.85 .M587 1985
Available from offsite location
- Format:
- Book
- Author/Creator:
- Morgan, Russ A., 1950-
- Series:
- Plasma technology ; 1.
- Plasma technology ; 1
- Language:
- English
- Subjects (All):
- Semiconductors--Etching.
- Semiconductors.
- Plasma etching.
- Physical Description:
- x, 316 pages : illustrations ; 25 cm.
- Place of Publication:
- Amsterdam ; New York : Elsevier, 1985.
- Notes:
- Includes index.
- Bibliography: pages 303-311.
- ISBN:
- 0444424199
- OCLC:
- 11784503
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