1 option
Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
LIBRA TR940 .O69 1985
Available from offsite location
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 538.
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 538
- Language:
- English
- Subjects (All):
- Photolithography--Congresses.
- Photolithography.
- Integrated circuits--Very large scale integration--Congresses.
- Integrated circuits.
- Integrated circuits--Very large scale integration.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- vi, 260 pages : illustrations ; 28 cm.
- Other Title:
- Optical microlithography 4.
- Optical microlithography four.
- Place of Publication:
- Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1985]
- Notes:
- Includes bibliographies and index.
- OCLC:
- 12395158
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.