Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.

Format:

Book

Contributor:

Thompson, L. F., 1944-

Willson, C. G. (C. Grant), 1939-

Tagawa, Seiichi.

American Chemical Society. Division of Polymeric Materials: Science and Engineering.

American Chemical Society. Meeting 1992 : San Francisco, Calif.)

Series:

ACS symposium series

ACS symposium series, 537 ; 0097-6156

Language:

English

Subjects (All):

Microelectronics--Materials.

Microelectronics.

Polymers.

Genre:

Conference papers and proceedings.

Physical Description:

xii, 571 pages : illustrations ; 23 cm.

Place of Publication:

Washington, D.C. : American Chemical Society, 1994.

Notes:

"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."

Includes bibliographical references and indexes.

ISBN:

0841227217

OCLC:

28722380