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Introduction to VLSI process engineering / edited by the Society of Chemical Engineers of Japan ; [editor in chief, Yuji Naka].
LIBRA TK7874 .I5957 1993
Available from offsite location
- Format:
- Book
- Language:
- English
- Subjects (All):
- Integrated circuits--Very large scale integration--Design and construction.
- Integrated circuits.
- Manufacturing processes.
- Physical Description:
- xiii, 210 pages : illustrations ; 24 cm
- Edition:
- English language edition.
- Place of Publication:
- London ; New York : Chapman & Hall, 1993.
- Notes:
- Includes bibliographical references (pages [201]-204).
- Includes index.
- ISBN:
- 0412395509
- OCLC:
- 27434850
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