Handbook of semiconductor wafer cleaning technology : science, technology, and applications / edited by Werner Kern.

Format:

Book

Contributor:

Kern, Werner, 1925-

Language:

English

Subjects (All):

Semiconductor wafers--Cleaning.

Semiconductor wafers.

Physical Description:

xx, 623 pages : illustrations ; 24 cm

Place of Publication:

Park Ridge, N.J. : Noyes Publications, [1993]

Summary:

This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date coverage of this rapidly evolving field. Its 13 chapters were written by 19 scientists who are recognized experts. The depth and breadth of the material should appeal to those new in the field as well as to experienced professionals. The volume is intended to serve as a handbook for practitioners and professionals in the field.

Notes:

Includes bibliographical references and index.

ISBN:

0815513313

OCLC:

27976222