1 option
The physics of micro/nano-fabrication / Ivor Brodie and Julius J. Muray.
LIBRA TK7874 .B725 1992
Available from offsite location
- Format:
- Book
- Author/Creator:
- Brodie, Ivor.
- Series:
- Microdevices
- Language:
- English
- Subjects (All):
- Microelectronics.
- Thin-film circuits.
- Physical Description:
- xix, 650 pages : illustrations ; 26 cm.
- Place of Publication:
- New York : Plenum Press, [1992]
- Notes:
- Includes bibliographical references and indexes.
- ISBN:
- 0306441462
- OCLC:
- 26398446
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.