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The physics of submicron lithography / Kamil A. Valiev.
LIBRA TK7874 .V336 1992
Available from offsite location
- Format:
- Book
- Author/Creator:
- Valiev, K. A. (Kamilʹ Akhmetovich)
- Series:
- Microdevices
- Language:
- English
- Subjects (All):
- Lithography, Electron beam.
- X-ray lithography.
- Ion beam lithography.
- Physics.
- Physical Description:
- xi, 493 pages : illustrations ; 26 cm.
- Place of Publication:
- New York : Plenum Press, [1992]
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 0306435780
- OCLC:
- 24845420
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