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Film deposition by plasma techniques / Mitsuharu Konuma.
LIBRA TK7871.15.F5 K58 1992
Available from offsite location
- Format:
- Book
- Author/Creator:
- Konuma, Mitsuharu, 1950-
- Series:
- Springer series on atoms + plasmas ; 10.
- Springer series on atoms + plasmas ; 10
- Language:
- English
- Subjects (All):
- Thin films.
- Plasma-enhanced chemical vapor deposition.
- Physical Description:
- ix, 224 pages : illustrations ; 24 cm.
- Place of Publication:
- Berlin ; New York : Springer-Verlag, [1992]
- Notes:
- Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref.
- Includes bibliographical references and index.
- ISBN:
- 3540525947
- 0387525947
- OCLC:
- 24667826
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