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Transmission electron microscopy of silicon VLSI circuits and structures / R.B. Marcus and T.T. Sheng.
LIBRA TK7874 .M26
Available from offsite location
- Format:
- Book
- Author/Creator:
- Marcus, R. B. (Robert B.)
- Language:
- English
- Subjects (All):
- Integrated circuits.
- Electron microscopy.
- Transmission electron microscopes.
- Physical Description:
- x, 217 pages : illustrations ; 29 cm
- Place of Publication:
- New York : Wiley, [1983]
- Notes:
- "A Wiley-Interscience publication."
- Includes bibliographical references and index.
- ISBN:
- 0471092517 :
- OCLC:
- 9324161
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