ASMC ... proceedings.

Format:

Conference/Event

Journal/Periodical

Contributor:

Joint IEEE/SEMI Committee on Semiconductor Manufacturing.

Semiconductor Equipment and Materials International.

IEEE Components, Hybrids, and Manufacturing Technology Society.

IEEE Electron Devices Society.

Conference Name:

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

Language:

English

Subjects (All):

Semiconductors--Design and construction--Congresses.

Semiconductors.

Semiconductors--Design and construction.

Semiconductor industry--Congresses.

Semiconductor industry.

Computer integrated manufacturing systems--Congresses.

Computer integrated manufacturing systems.

Genre:

Conference papers and proceedings.

Physical Description:

volumes : illustrations ; 28 cm

Annual

1990-

Other Title:

IEEE/SEMI advanced semiconductor manufacturing conference

ASMC

Advanced semiconductor manufacturing conference and workshop

Proceedings, Advanced Semiconductor Manufacturing Conference and Workshop (ASMC)

Place of Publication:

New York, NY : Institute of Electrical and Electronics Engineers, 1990-

Notes:

Conference for 1990- sponsored by: Joint IEEE/SEMI Committee on Semiconductor Manufacturing, composed of: Semiconductor Equipment and Materials International, Electron Devices Society, and the Components, Hybrids, & Manufacturing Technology Society.

OCLC:

145397278