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Polycrystalline silicon for integrated circuit applications / by Ted Kamins.
LIBRA TK7871.15.S55 K36 1988
Available from offsite location
- Format:
- Book
- Author/Creator:
- Kamins, Theodore I.
- Series:
- Kluwer international series in engineering and computer science ; SECS 45.
- Kluwer international series in engineering and computer science ; SECS 45
- Language:
- English
- Subjects (All):
- Integrated circuits--Materials.
- Integrated circuits.
- Silicon--Electric properties.
- Silicon.
- Physical Description:
- xii, 290 pages : illustrations ; 24 cm.
- Place of Publication:
- Boston : Kluwer Academic Publishers, [1988]
- Notes:
- Includes index.
- Bibliography: pages 249-280.
- ISBN:
- 0898382599
- OCLC:
- 17202719
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