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Proceedings : IEEE micro electro mechanical systems.
LIBRA TK153 .I232 3rd (1990)-7th (1994), 9th (1996)-11th (1998)
Available from offsite location
- Format:
- Conference/Event
- Journal/Periodical
- Conference Name:
- IEEE Workshop on Micro Electro Mechanical Systems.
- Language:
- English
- Subjects (All):
- Electromechanical devices--Congresses.
- Electromechanical devices.
- Microelectronics--Congresses.
- Microelectronics.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- volumes : illustrations ; 28 cm
- Annual
- Began with 1st in 1988?
- -11th (1998).
- Other Title:
- IEEE micro electro mechanical systems
- Micro electro mechanical systems
- MEMS
- Continued By:
- IEEE International Conference on Micro Electro Mechanical Systems. Technical digest
- Place of Publication:
- New York, N.Y. : Institute of Electrical and Electronics Engineers
- Notes:
- Description based on: 3rd (1990).
- "An investigation of micro structures, sensors, actuators, machines and robots."
- Workshop for <1990-> sponsored by the IEEE Robotics and Automation Society and in cooperation with the ASME Dynamic Systems and Control Division.
- OCLC:
- 173705327
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